Axcelis Technologies Inc.

18

19

103.35

Date Time Volume Order Volume Price
03/05/2024 21:50:29.229 70   103.35
      70 103.35
      70 103.35
03/05/2024 19:18:41.004 70   103.80
      70 103.80
      70 103.80
03/05/2024 18:44:53.069 30   104.55
      30 104.55
      30 104.55
03/05/2024 18:26:21.357 35   105.15
      35 105.15
      35 105.15
03/05/2024 18:17:41.981 2   105.90
      2 105.90
      2 105.90
03/05/2024 17:00:28.256 27   104.70
      27 104.70
      27 104.70
03/05/2024 16:59:48.515 200   104.70
      200 104.70
      200 104.70
03/05/2024 16:49:46.646 56   105.50
      56 105.50
      56 105.50
03/05/2024 16:42:28.736 227   105.70
      227 105.70
      227 105.70
03/05/2024 16:28:23.814 5   105.15
      5 105.15
      5 105.15
03/05/2024 16:02:05.700 20   103.45
      20 103.45
      20 103.45
03/05/2024 15:14:20.850 1   101.95
      1 101.95
      1 101.95
03/05/2024 14:30:12.862 5   101.00
      5 101.00
      5 101.00
03/05/2024 14:24:55.833 60   101.25
      60 101.25
      60 101.25
03/05/2024 13:11:13.128 9   100.20
      9 100.20
      9 100.20
03/05/2024 12:09:07.556 61   100.20
      61 100.20
      61 100.20
03/05/2024 11:45:39.973 20   100.05
      20 100.05
      20 100.05
03/05/2024 09:51:19.535 39   99.08
      39 99.08
      39 99.08
03/05/2024 09:51:16.884 61   99.48
      61 99.48
      61 99.48
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